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Lam Research 810-107813R117 ESC Power Supply Board
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Lam Research 810-107813R117 ESC Power Supply Board
High-reliability power supply board for semiconductor manufacturing equipment
| Brand | Lam Research |
| Model | 810-107813R117 |
| Voltage | 208-240V AC |
| Country of Origin | United States |
| Weight | 3.2 kg |
| Dimensions | 300 x 200 x 50 mm |
| Warranty | 1 year |
| Certifications | CE, UL, RoHS |
| SKU / MPN | 810-107813R117 |
| What’s in the box | ESC Power Supply Board, mounting hardware, installation guide |
| Input Voltage Range | 208-240V AC |
| Output Voltage | 48V DC |
| Power Rating | 500W |
| Operating Temperature | 0 to +50°C |
| Protection Class | IP20 |
| Cooling Method | Forced air |
Key benefits: Designed for precise voltage regulation and stable power delivery in demanding industrial environments. Enhances equipment uptime and reduces maintenance costs.
Typical applications: Semiconductor wafer processing equipment, electrostatic chuck (ESC) systems, plasma etching tools
Order number: Lam Research 810-107813R117 ESC Power Supply Board
Lifecycle: Active
Documentation: Online PDF
1 review for Lam Research 810-107813R117 ESC Power Supply Board
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Thomas K. –
The stepper motor is smooth and quiet. Will use this supplier again.