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Lam RESEARCH RF Power Supply Model 853-064887-010 – Efficient Energy
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Lam RESEARCH RF Power Supply Model 853-064887-010 – Efficient Energy
High-efficiency RF power supply for semiconductor manufacturing processes
| Brand | Lam Research |
| Model | 853-064887-010 |
| Voltage | 380-480V AC |
| Country of Origin | United States |
| Weight | 15 kg |
| Dimensions | 400 x 300 x 200 mm |
| Warranty | 2 years |
| Certifications | CE, UL, RoHS |
| SKU / MPN | 853-064887-010 |
| What’s in the box | RF Power Supply, power cable, user manual, mounting brackets |
| Output Power | 3 kW |
| Frequency Range | 13.56 MHz |
| Efficiency | 92% |
| Cooling Method | Forced air |
| Operating Temperature | 0 to +50°C |
| Protection Class | IP54 |
Key benefits: Optimized for plasma etching and deposition applications, ensures stable and reliable RF power delivery, reduces energy consumption
Typical applications: Semiconductor fabrication, plasma etching, chemical vapor deposition (CVD)
Order number: Lam RESEARCH RF Power Supply Model 853-064887-010 – Efficient Energy
Lifecycle: Active
Documentation: Online PDF
1 review for Lam RESEARCH RF Power Supply Model 853-064887-010 – Efficient Energy
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Mark O. –
The servo amplifier performed well in velocity mode. Documentation was helpful.